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Number of items: 2.
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Murphy, J. J., Jones, R. G., Cordina, G. (1997) Electron beam resists based on oxirane functionalised polystyrenes. Microelectronics Engineering, 35 (1-4). pp. 121-124. ISSN 0167-9317. (doi:10.1016/S0167-9317(96)00169-4) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:18207) |
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Tate, P. C. Miller, Jones, R. G., Murphy, J., Everett, J. (1995) Simple-Model Of The Lithographic Response Of Hatzakis Chemically-Amplified Resists. Microelectronics Engineering, 27 (1-4). pp. 409-412. ISSN 0167-9317. (doi:10.1016/0167-9317(94)00135-H) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:19085) |