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Electron beam resists based on oxirane functionalised polystyrenes

Murphy, J. J., Jones, R. G., Cordina, G. (1997) Electron beam resists based on oxirane functionalised polystyrenes. Microelectronics Engineering, 35 (1-4). pp. 121-124. ISSN 0167-9317. (doi:10.1016/S0167-9317(96)00169-4) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:18207)

The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided.
Official URL:
http://dx.doi.org/10.1016/S0167-9317(96)00169-4

Abstract

Copolymers consisting of styrene and 4-ethenyl-phenyloxirane (epoxystyrene) can be synthesised by radical copolymerisation. The flexibility offered by this simple method of synthesis allows the production of a variety of copolymers. The possibility of altering the lithographic parameters by modification of the copolymer makes this method of production highly attractive for the purposes of lithographic optimisation. More so than for the analogous systems based upon epoxy novolak resins which suffer because a range of different polymers that, would allow a worthwhile structure/process optimisation, is not available.

Item Type: Article
DOI/Identification number: 10.1016/S0167-9317(96)00169-4
Additional information: Conference Information: Micro and Nano Engineering Conference 1996 (MNE 96) UNIV Glasgow, Glasgow, Scotland, Sep 22-25, 1996 Univ Glasgow; Glasgow Dev Agcy; Oxford Instruments; Leica Cambridge Ltd; Elsevier; Greater Glasgow & Clyde Valley Tourist Board; City Glasgow; Motorola; IEEE LEOS Scott Chapter
Subjects: T Technology > TK Electrical engineering. Electronics. Nuclear engineering
T Technology
Divisions: Divisions > Division of Computing, Engineering and Mathematical Sciences > School of Engineering and Digital Arts
Depositing User: M.A. Ziai
Date Deposited: 17 Apr 2009 17:41 UTC
Last Modified: 16 Nov 2021 09:56 UTC
Resource URI: https://kar.kent.ac.uk/id/eprint/18207 (The current URI for this page, for reference purposes)

University of Kent Author Information

Jones, R. G..

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