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1988

Oven, Robert, Ashworth, D.G., Hill, C. (1988) Simulation and Measurement of the Lateral Spreading of Ions Implanted into Amorphous Targets. In: Simulation of Semiconductor Devices & Processes. 3. pp. 429-440. (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:38932)

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