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Arnold, Donna C., Blake, A., Quinn, A., Iacopino, D., Tobin, J.M., Omahony, C., Holmes, J.D., Morris, M.A. (2011) Planarized and nanopatterned mesoporous silica thin films by chemical-mechanical polishing of gap-filled topographically patterned substrates. IEEE Transactions on Nanotechnology, 10 (3). pp. 451-461. ISSN 1536-125X. (doi:10.1109/TNANO.2010.2046909) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:49061)

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