Skip to main content

A method of measuring depth dependent lateral spreading of ions implanted into amorphous targets

Ashworth, D.G., Oven, Robert, Hill, C., Clark, E., Dowsett, M., Thornton, J (1988) A method of measuring depth dependent lateral spreading of ions implanted into amorphous targets. In: UKIT '88 Conference, 1988, Swansea UK. (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:38931)

The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided.
Item Type: Conference or workshop item (Paper)
Subjects: T Technology
Divisions: Divisions > Division of Computing, Engineering and Mathematical Sciences > School of Engineering and Digital Arts
Depositing User: Tina Thompson
Date Deposited: 27 Mar 2014 15:33 UTC
Last Modified: 16 Nov 2021 10:15 UTC
Resource URI: https://kar.kent.ac.uk/id/eprint/38931 (The current URI for this page, for reference purposes)

University of Kent Author Information

Ashworth, D.G..

Creator's ORCID:
CReDIT Contributor Roles:

Oven, Robert.

Creator's ORCID: https://orcid.org/0000-0002-8517-3634
CReDIT Contributor Roles:
  • Depositors only (login required):

Total unique views for this document in KAR since July 2020. For more details click on the image.