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A method of measuring depth dependent lateral spreading of ions implanted into amorphous targets

Ashworth, D.G., Oven, Robert, Hill, C., Clark, E., Dowsett, M., Thornton, J (1988) A method of measuring depth dependent lateral spreading of ions implanted into amorphous targets. In: UKIT '88 Conference, 1988, Swansea UK. (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:38931)

The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided. (Contact us about this Publication)
Item Type: Conference or workshop item (Paper)
Subjects: T Technology
Divisions: Faculties > Sciences > School of Engineering and Digital Arts
Faculties > Sciences > School of Engineering and Digital Arts > Broadband & Wireless Communications
Depositing User: Tina Thompson
Date Deposited: 27 Mar 2014 15:33 UTC
Last Modified: 25 Jan 2020 04:05 UTC
Resource URI: https://kar.kent.ac.uk/id/eprint/38931 (The current URI for this page, for reference purposes)
Oven, Robert: https://orcid.org/0000-0002-8517-3634
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