A method of measuring depth dependent lateral spreading of ions implanted into amorphous targets

Ashworth, D.G., Oven, Robert, Hill, C., Clark, E., Dowsett, M., Thornton, J (1988) A method of measuring depth dependent lateral spreading of ions implanted into amorphous targets. In: UKIT '88 Conference, 1988, Swansea UK. (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:38931)

The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided.

Item Type:	Conference or workshop item (Paper)
Subjects:	T Technology
Divisions:	Divisions > Division of Computing, Engineering and Mathematical Sciences > School of Engineering and Digital Arts
Depositing User:	Tina Thompson
Date Deposited:	27 Mar 2014 15:33 UTC
Last Modified:	05 Nov 2024 10:23 UTC
Resource URI:	https://kar.kent.ac.uk/id/eprint/38931 (The current URI for this page, for reference purposes)

University of Kent Author Information

Ashworth, D.G..

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Oven, Robert.

Creator's ORCID:	https://orcid.org/0000-0002-8517-3634
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