Skip to main content

A comparison of two-dimensional ion-implantation profiles

Oven, Robert, Ashworth, D.G. (1987) A comparison of two-dimensional ion-implantation profiles. Journal of Physics D: Applied Physics, 20 (9). p. 1219. ISSN 0022-3727. (doi:10.1088/0022-3727/20/9/525) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:38927)

The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided. (Contact us about this Publication)
Official URL
http://dx.doi.org/10.1088/0022-3727/20/9/525
Item Type: Article
DOI/Identification number: 10.1088/0022-3727/20/9/525
Subjects: T Technology
Divisions: Faculties > Sciences > School of Engineering and Digital Arts
Faculties > Sciences > School of Engineering and Digital Arts > Broadband & Wireless Communications
Depositing User: Tina Thompson
Date Deposited: 27 Mar 2014 15:20 UTC
Last Modified: 25 Jan 2020 04:05 UTC
Resource URI: https://kar.kent.ac.uk/id/eprint/38927 (The current URI for this page, for reference purposes)
Oven, Robert: https://orcid.org/0000-0002-8517-3634
  • Depositors only (login required):