A comparison of two-dimensional ion-implantation profiles

Oven, Robert, Ashworth, D.G. (1987) A comparison of two-dimensional ion-implantation profiles. Journal of Physics D: Applied Physics, 20 (9). p. 1219. ISSN 0022-3727. (doi:10.1088/0022-3727/20/9/525) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:38927)

The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided.
Official URL: http://dx.doi.org/10.1088/0022-3727/20/9/525

Item Type:	Article
DOI/Identification number:	10.1088/0022-3727/20/9/525
Subjects:	T Technology
Institutional Unit:	Schools > School of Engineering, Mathematics and Physics > Engineering
Former Institutional Unit:	Divisions > Division of Computing, Engineering and Mathematical Sciences > School of Engineering and Digital Arts
Depositing User:	Tina Thompson
Date Deposited:	27 Mar 2014 15:20 UTC
Last Modified:	20 May 2025 10:38 UTC
Resource URI:	https://kar.kent.ac.uk/id/eprint/38927 (The current URI for this page, for reference purposes)

University of Kent Author Information

Oven, Robert.

Creator's ORCID:	https://orcid.org/0000-0002-8517-3634
CReDIT Contributor Roles:

Ashworth, D.G..

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