Ashworth, D.G., Bowyer, M.D.J., Oven, Robert (2000) Representation of ion implantation distributions in two and three dimensions. Journal of Physics D: Applied Physics, 24 (7). pp. 1120-1125. ISSN 0022-3727. (doi:10.1088/0022-3727/24/7/015) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:38897)
| The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided. | |
| Official URL: http://dx.doi.org/10.1088/0022-3727/24/7/015 |
Abstract
The representation of two- and three-dimensional point response functions by Pearson frequency distribution curves is discussed for the case of energetic ions implanted into homogeneous, amorphous material. Comparisons are made between the Pearson curves and high-resolution Monte Carlo simulations. It is shown that no extra information is required to derive the three-dimensional representation once the two-dimensional representation is known.
| Item Type: | Article |
|---|---|
| DOI/Identification number: | 10.1088/0022-3727/24/7/015 |
| Subjects: | T Technology |
| Divisions: | Divisions > Division of Computing, Engineering and Mathematical Sciences > School of Engineering and Digital Arts |
| Depositing User: | Tina Thompson |
| Date Deposited: | 24 Mar 2014 16:58 UTC |
| Last Modified: | 05 Nov 2024 10:23 UTC |
| Resource URI: | https://kar.kent.ac.uk/id/eprint/38897 (The current URI for this page, for reference purposes) |
University of Kent Author Information
Ashworth, D.G..
| Creator's ORCID: | |
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| CReDIT Contributor Roles: |
Oven, Robert.
| Creator's ORCID: |
 https://orcid.org/0000-0002-8517-3634
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|---|---|
| CReDIT Contributor Roles: |
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