Chen, Hongwei, Wang, Chao, Yazaki, Akio, Kim, Chanju, Goda, Keisuke, Jalali, Bahram (2013) Ultrafast web inspection with hybrid dispersion laser scanner. Applied Optics, 52 (17). pp. 4072-4076. ISSN 0003-6935. (doi:10.1364/AO.52.004072) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:35551)
| The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided. | |
| Official URL: http://dx.doi.org/10.1364/AO.52.004072 |
Abstract
We report an ultrafast web inspector that operates at a 1000 times higher scan rate than conventional methods. This system is based on a hybrid dispersion laser scanner that performs line scans at nearly 100 MHz. Specifically, we demonstrate web inspection with detectable resolution of 48.6???m/pixel (scan direction) ×??23???m (web flow direction) within a width of view of 6 mm at a record high scan rate of 90.9 MHz. We demonstrate the identification and evaluation of particles on silicon wafers. This method holds great promise for speeding up quality control and hence reducing manufacturing costs.
| Item Type: | Article |
|---|---|
| DOI/Identification number: | 10.1364/AO.52.004072 |
| Subjects: | T Technology |
| Divisions: | Divisions > Division of Computing, Engineering and Mathematical Sciences > School of Engineering and Digital Arts |
| Depositing User: | Tina Thompson |
| Date Deposited: | 21 Oct 2013 11:17 UTC |
| Last Modified: | 05 Nov 2024 10:19 UTC |
| Resource URI: | https://kar.kent.ac.uk/id/eprint/35551 (The current URI for this page, for reference purposes) |
University of Kent Author Information
Wang, Chao.
| Creator's ORCID: |
 https://orcid.org/0000-0002-0454-8079
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