Wacogne, Bruno, Roe, M.P., Pannell, Christopher N. (1995) Deposition, evaluation and application of sputtered zinc oxide thin films. International Journal of Optoelectronics, 10 (1). pp. 9-18. ISSN 0952-5432. (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:19112)
| The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided. |
Abstract
We discuss the production of oriented zinc oxide piezoelectric thin films grown by RF magnetron sputtering, and film evaluation techniques. In particular, we present a simple interferometric method for in situ and simultaneous measurement of film thickness and optical losses. We also show that due to plasma heating, the increase in substrate temperature at the beginning of the film growth leads to a varying film structure, causing a discrepancy between the expected and the observed resonant frequency of the films. We conclude this paper by presenting experimental results of acousto-optic interaction.
| Item Type: | Article |
|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics. Nuclear engineering > TK7800 Electronics |
| Divisions: | Divisions > Division of Natural Sciences > Physics and Astronomy |
| Depositing User: | I.T. Ekpo |
| Date Deposited: | 25 Oct 2009 13:06 UTC |
| Last Modified: | 16 Nov 2021 09:57 UTC |
| Resource URI: | https://kar.kent.ac.uk/id/eprint/19112 (The current URI for this page, for reference purposes) |
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