Skip to main content

Generating ion implantation profiles in one and two dimensions .2. Depth-dependent moments and line-source responses

Bowyer, M.D.J., Ashworth, D.G., Oven, Robert (1996) Generating ion implantation profiles in one and two dimensions .2. Depth-dependent moments and line-source responses. Journal of Physics D: Applied Physics, 29 (5). pp. 1286-1299. ISSN 0022-3727. (doi:10.1088/0022-3727/29/5/023) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:18839)

The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided.
Official URL:
http://dx.doi.org/10.1088/0022-3727/29/5/023

Abstract

In this, the second of two papers, various techniques and models are proposed for the extraction of depth-dependent lateral moments from the depth-independent mixed moments produced by transport equation solvers. These depth-dependent moments are then compared with those obtained directly from Monte Carlo simulations. A set of such comparisons, using consistent input quantities, is performed over a range of ion-target mass ratios and energies. The depth-dependent moments are then combined with Pearson and/or Johnson curves to form two-dimensional ion implantation profiles. Comparisons are made between these line-source responses (LSRs) and LSRs obtained directly from Monte Carlo simulations into a-Si for the various models over a range of energies and ion types. Selection of appropriate models leads to LSRs for the ions B, P and As implanted into a-Si which are in good agreement with Monte Carte simulations over three orders of magnitude of profile concentration. The techniques described will enable two-dimensional profile information to be stored and regenerated, quickly and efficiently, within process simulators so that rapid optimization of processing parameters may be achieved.

Item Type: Article
DOI/Identification number: 10.1088/0022-3727/29/5/023
Subjects: Q Science > QC Physics
Divisions: Divisions > Division of Computing, Engineering and Mathematical Sciences > School of Engineering and Digital Arts
Depositing User: M.A. Ziai
Date Deposited: 16 May 2009 05:42 UTC
Last Modified: 16 Nov 2021 09:57 UTC
Resource URI: https://kar.kent.ac.uk/id/eprint/18839 (The current URI for this page, for reference purposes)

University of Kent Author Information

Ashworth, D.G..

Creator's ORCID:
CReDIT Contributor Roles:

Oven, Robert.

Creator's ORCID: https://orcid.org/0000-0002-8517-3634
CReDIT Contributor Roles:
  • Depositors only (login required):

Total unique views for this document in KAR since July 2020. For more details click on the image.