Small-Angle X-Ray-Scattering Studies Of a-Si-C-H

Rigden, Jane S., Algar, C.D., Newport, Robert J., North, A.N., Ibrahim, F., Wilson, J.I.B. (1995) Small-Angle X-Ray-Scattering Studies Of a-Si-C-H. Journal of Non-Crystalline Solids, 190 (3). pp. 276-282. ISSN 0022-3093. (doi:10.1016/0022-3093(95)00279-0) (Access to this publication is currently restricted. You may be able to access a copy if URLs are provided) (KAR id:15966)

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Official URL: http://dx.doi.org/10.1016/0022-3093(95)00279-0

Abstract

Small-angle X-ray scattering studies have been performed on a series of four a-Si:C:H alloys, prepared by rf glow discharge decomposition of varying proportions of propane and silane, in an attempt to elucidate their mesoscopic structure. The observed broad scattering peak has been interpreted as originating from irregular, elongated voids with a repeat distance of about 20 Angstrom and correlation length of about 25 Angstrom. The implications of this result in explaining the photo-oxidation properties of the material are also discussed.

Item Type:	Article
DOI/Identification number:	10.1016/0022-3093(95)00279-0
Subjects:	Q Science
Divisions:	Divisions > Division of Natural Sciences > Physics and Astronomy
Depositing User:	J.M. Smith
Date Deposited:	07 May 2009 13:42 UTC
Last Modified:	05 Nov 2024 09:50 UTC
Resource URI:	https://kar.kent.ac.uk/id/eprint/15966 (The current URI for this page, for reference purposes)

University of Kent Author Information

Newport, Robert J..

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