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A transport equation model that is consistent with Monte Carlo simulations of ion implantation into infinite targets

Oven, Robert, Bowyer, M.D.J., Ashworth, D.G. (1993) A transport equation model that is consistent with Monte Carlo simulations of ion implantation into infinite targets. Journal of Physics: Condensed Matter, 5 (14). pp. 2157-2170. ISSN 0953-8984. (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:53079)

The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided. (Contact us about this Publication)

Abstract

In this paper a transport equation (TE) is derived that matches closely (within the limitation of an infinite target) the transport model in the Monte Carlo code TRIM. Initially, the authors derive a TE that incorporates an arbitrary free-flight path length distribution function and a stopping energy. From this TE a coupled set of integral equations (for spatial moments up to order four) incorporating the liquid free-flight path model used in TRIM is derived. Also, for the gas-like model of the free-flight path length distribution, the equivalence is shown between the new TE and the LSS backward linearized Boltzmann equation extended by Brice to include an intermediate energy.

Item Type: Article
Subjects: T Technology
Divisions: Faculties > Sciences > School of Engineering and Digital Arts
Faculties > Sciences > School of Engineering and Digital Arts > Broadband & Wireless Communications
Depositing User: Tina Thompson
Date Deposited: 10 Dec 2015 16:11 UTC
Last Modified: 25 Jan 2020 04:08 UTC
Resource URI: https://kar.kent.ac.uk/id/eprint/53079 (The current URI for this page, for reference purposes)
Oven, Robert: https://orcid.org/0000-0002-8517-3634
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