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Simulation of three-dimensional ion implantation distributions

Ashworth, D.G., Moulavi-Kakhki, M., Oven, Robert (1985) Simulation of three-dimensional ion implantation distributions. Journal of Physics C: Solid State Physics, 18 (26). pp. 5043-5054. ISSN 0022-3719. (doi:10.1088/0022-3719/18/26/015) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:38929)

The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided. (Contact us about this Publication)
Official URL
http://dx.doi.org/10.1088/0022-3719/18/26/015

Abstract

The theoretical model and computer program (AMPITS) of Ashworth and coworkers (1984) for the calculation of projected range distributions of implanted ions in multielement multilayer amorphous targets are extended to provide a new method for the derivation of three-dimensional implantation distributions in single-layer targets. The method involves the computation of the chord range distribution and this, together with the projected range distribution, enables the lateral standard deviation to be evaluated. Computed values of lateral standard deviation are found to agree well with those derived previously by Furukawa and Ishiwara (1982). Three-dimensional distributions are constructed using the projected range and chord range distributions together with the lateral standard deviation in the computer program AMPITS-3D.

Item Type: Article
DOI/Identification number: 10.1088/0022-3719/18/26/015
Subjects: T Technology
Divisions: Faculties > Sciences > School of Engineering and Digital Arts
Faculties > Sciences > School of Engineering and Digital Arts > Broadband & Wireless Communications
Depositing User: Tina Thompson
Date Deposited: 27 Mar 2014 15:24 UTC
Last Modified: 25 Jan 2020 04:05 UTC
Resource URI: https://kar.kent.ac.uk/id/eprint/38929 (The current URI for this page, for reference purposes)
Oven, Robert: https://orcid.org/0000-0002-8517-3634
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