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Theoretical predictions of the lateral spreading of implanted ions

Ashworth, D.G., Oven, Robert (1986) Theoretical predictions of the lateral spreading of implanted ions. Journal of Physics C: Solid State Physics, 19 (29). pp. 5769-5781. ISSN 0022-3719. (doi:10.1088/0022-3719/19/29/004) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided)

The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided. (Contact us about this Publication)
Official URL
http://dx.doi.org/10.1088/0022-3719/19/29/004

Abstract

The theoretical model and computer program (AAMPITS-3D) of Ashworth and coworkers (1985) for the calculation of three-dimensional distributions of implanted ions in multielement amorphous targets are extended to show that the lateral rest distribution is gaussian in a form with a lateral standard deviation (lateral-spread function) which is a function of depth beneath the target surface. A method is given whereby this function may be accurately determined from a knowledge of the projected range and chord range rest distribution functions. Examples of the lateral-spread function are given for boron, phosphorus and arsenic ions implanted into silicon and a detailed description is given of how the lateral-spread function may be used in conjunction with the projected range rest distribution function to provide a fully three-dimensional rest distribution of ions implanted into amorphous targets. Examples of normalised single ion isodensity contours computed from AMPITS-3D are compared with those obtained using the previous assumption of a lateral standard deviation which was independent of distance beneath the target surface.

Item Type: Article
DOI/Identification number: 10.1088/0022-3719/19/29/004
Subjects: T Technology
Divisions: Faculties > Sciences > School of Engineering and Digital Arts
Faculties > Sciences > School of Engineering and Digital Arts > Broadband & Wireless Communications
Depositing User: Tina Thompson
Date Deposited: 27 Mar 2014 15:21 UTC
Last Modified: 25 Jan 2020 04:05 UTC
Resource URI: https://kar.kent.ac.uk/id/eprint/38928 (The current URI for this page, for reference purposes)
Oven, Robert: https://orcid.org/0000-0002-8517-3634
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