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A neutron and X-ray diffraction study of the influence of deposition conditions on the structure of a-C:H

Walters, J.K., Algar, C.D., Burke, Terry, Rigden, Jane S., Newport, Robert J., Bushnell-Wye, Graham, Howells, W.S., Sattel, S., Weiler, M., Ehrhardt, H. and others. (1996) A neutron and X-ray diffraction study of the influence of deposition conditions on the structure of a-C:H. Journal of Non-Crystalline Solids, 197 (1). pp. 41-52. ISSN 0022-3093. (doi:10.1016/0022-3093(95)00616-8) (Access to this publication is currently restricted. You may be able to access a copy if URLs are provided) (KAR id:15985)

Language: English

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The atomic scale structure of amorphous hydrogenated carbon (a-C:H) films prepared from an acetylene precursor by plasma enhanced chemical vapour deposition (PECVD) and a fast-atom source (FAS) have been studied by neutron and X-ray diffraction. The effect of beam energy on the structure of the film is investigated, and comparison is made to samples prepared using at fast atom (neutral particle) source, also using acetylene as the precursor, The results show that, in both deposition methods, increasing the beam energy produces a lower total sp(2) hybridised carbon content in the film with evidence for a shift from pure olefinic to some aromatic/graphitic bonding in the FAS samples. The high resolution real-space neutron diffraction data allows a direct determination of the single:double bond ratio, and also shows the presence of sp(1) hybridised carbon bonding environments.

Item Type: Article
DOI/Identification number: 10.1016/0022-3093(95)00616-8
Subjects: Q Science
Divisions: Divisions > Division of Natural Sciences > Physics and Astronomy
Depositing User: J.M. Smith
Date Deposited: 28 Apr 2009 14:54 UTC
Last Modified: 16 Nov 2021 09:53 UTC
Resource URI: (The current URI for this page, for reference purposes)

University of Kent Author Information

Newport, Robert J..

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