Skip to main content

Characterisation of sol-gel prepared (HfO2)(x)(SiO2)(1-x) (x=0.1, 0.2 and 0.4) by H-1, C-13, O-17 and Si-29 MAS NMR, FTIR and TGA

O'Dell, Luke A., Gunawidjaja, Philips N., Holland, Mark A., Mountjoy, Gavin, Pickup, David M., Newport, Robert J., Smith, Mark E. (2008) Characterisation of sol-gel prepared (HfO2)(x)(SiO2)(1-x) (x=0.1, 0.2 and 0.4) by H-1, C-13, O-17 and Si-29 MAS NMR, FTIR and TGA. Solid State Nuclear Magnetic Resonance, 33 (1-2). pp. 16-24. ISSN 0926-2040. (doi:10.1016/j.ssnmr.2007.11.001) (Access to this publication is currently restricted. You may be able to access a copy if URLs are provided) (KAR id:15944)

Language: English

Restricted to Repository staff only
[thumbnail of characterisation_HfOSiO_by_MASNMR_FTIR_and_TGA.pdf]
Official URL


The HfO2-SiO2 system is attracting interest as a possible new dielectric material in semiconductor devices. Knowledge of the location of hafnium within the silica network and the effect hafnium has on the structure will be central to the successful use of this material system in this application. Here, sol-gel techniques have been used to manufacture (HfO2)(x)(SiO2)(1-x) samples (x = 0.1, 0.2 and 0.4, each heat treated at 250, 500 and 750 degrees C) and these have been characterised by magic angle spinning (MAS) NMR (H-1, C-13, O-17, Si-29), Fourier transform infrared spectroscopy (FTIR) and thermogravimetric analysis. 29Si MAS NMR showed that increasing the hafnia content decreases the connectivity of the silicate network, i.e. increases the range of differently connected SiO4 (Q(n)) units with more having increased numbers of non-bridging oxygens (i.e. lower n). FTIR and O-17 MAS NMR showed unequivocally that the x = 0.4 sample phase-separated at higher temperatures, while in the x = 0.1 sample the hafnium was homogeneously mixed into the SiO2 phase without any phase separation. (C) 2007 Elsevier Inc. All rights reserved.

Item Type: Article
DOI/Identification number: 10.1016/j.ssnmr.2007.11.001
Subjects: Q Science
Divisions: Divisions > Division of Natural Sciences > Physics and Astronomy
Depositing User: J.M. Smith
Date Deposited: 13 May 2009 11:49 UTC
Last Modified: 16 Nov 2021 09:53 UTC
Resource URI: (The current URI for this page, for reference purposes)
Mountjoy, Gavin:
  • Depositors only (login required):