An X-Ray-Scattering Study Of Amorphous Hydrogenated Carbon

The structure of “diamond-like” carbon, a-C:H has been studied using the Xray diffraction facilities available at the Synchrotron Radiation Source (Daresbury Lab, UK). The principle advantage of using the SRS is that high fluxes are available at short wavelengths (? ? 0.6Å): it is therefore possible to extract the “diffuse” scattering profile associated with all amorphous systems with considerable precision over a very wide K-range. A novel diffraction technique is also described in which the X-ray beam is incident on an as-deposited thin film at or near the critical angle. In this geometry we demonstrate that it is possible to gather diffraction data on -1?m films in-situ.