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Article

Arnold, Donna C. and Blake, A. and Quinn, A. and Iacopino, D. and Tobin, J.M. and Omahony, C. and Holmes, J.D. and Morris, M.A. (2011) Planarized and nanopatterned mesoporous silica thin films by chemical-mechanical polishing of gap-filled topographically patterned substrates. IEEE Transactions on Nanotechnology, 10 (3). pp. 451-461. ISSN 1536-125X. (doi:https://doi.org/10.1109/TNANO.2010.2046909) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided)

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