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Article

Zayer, Nadhum K., Henderson, Philip J., Grellier, A.J.C., Pannell, Christopher N. (1999) In situ substrate temperature measurements during radio frequency sputtering of ZnO thin film using fiber Bragg grating. Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films, 17 (3). pp. 871-876. ISSN 0734-2101. (doi:10.1116/1.581696) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:16771)

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