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Article

Jones, R.G. and Cordina, G.P.G. and Murphy, J.J. (1997) Radiation chemistry and the lithographic performance of chemical amplification resists formulated from poly(4-epoxystyrene-stat-styrene) and a photoacid generator. Journal of Materials Chemistry, 7 (3). pp. 421-427. ISSN 0959-9428. (The full text of this publication is not available from this repository)

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