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Tate, Philip C. Miller and Jones, Richard G. and Murphy, J. and Everett, J. (1995) Simple-Model Of The Lithographic Response Of Hatzakis Chemically-Amplified Resists. In: International Conference on Microfabrication and Nanofabrication, Sep 26-29, 1994, Davos, Switzerland. (The full text of this publication is not available from this repository)

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