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Tate, Philip C. Miller and Jones, Richard G. and Murphy, J. and Everett, J. (1995) Simple-Model Of The Lithographic Response Of Hatzakis Chemically-Amplified Resists. In: Microelectronics Engineering. Elsevier Science Bv, Amsterdam, Netherland pp. 409-412. (doi:https://doi.org/10.1016/0167-9317(94)00135-H) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) |