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Conference or workshop item
Oven, Robert and Ashworth, D.G. and Hill, C. (1988) Simulation and Measurement of the Lateral Spreading of Ions Implanted into Amorphous Targets. In: Simulation of Semiconductor Devices & Processes. pp. 429-440. (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) |
Ashworth, D.G. and Oven, Robert and Hill, C. and Clark, E. and Dowsett, M. and Thornton, J (1988) A method of measuring depth dependent lateral spreading of ions implanted into amorphous targets. In: UKIT '88 Conference, 1988, Swansea UK. (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) |