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1998
Walters, J.K. and Kuhn, M. and Spaeth, C. and Dooryhee, E. and Newport, Robert J. (1998) X-ray diffraction studies of the effects of N incorporation in amorphous CNx, materials. Journal of Applied Physics, 83 (7). pp. 3529-3534. ISSN 0021-8979. (doi:https://doi.org/10.1063/1.366566) (Full text available) |