Murphy, J.J and Jones, R.G. (2001) Application of the Charlesby model to the radiation-induced chain reaction cross-linking of oxirane functionalised polymers. Radiation Physics and Chemistry, 60 (1-2). pp. 111-120. ISSN 0969-806X.
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| Official URL http://dx.doi.org/10.1016/S0969-806X(00)00315-7 |
Abstract
A range of copolymers containing styrene and epoxystyrene, when formulated with a photo-acid generator, undergo a cross-linking reaction by a chain reaction mechanism when exposed to high-energy radiation in an electron beam lithographic writing machine. The sensitivities of the formulations are shown to correlate with a simple kinetic model for the radiation chemistry of the system. Deductions about the nature of the cross-linking species have been made by comparing the behaviour of the epoxystyrene system with that observed for an epoxy novolac. (C) 2001 Elsevier Science Ltd. All rights reserved.
| Item Type: | Article |
|---|---|
| Additional information: | 19 PERGAMON-ELSEVIER SCIENCE LTD 396ZP |
| Uncontrolled keywords: | Charlesby model; crosslinking; epoxystyrene; epoxy novolac ELECTRON-BEAM RESISTS; LITHOGRAPHIC PERFORMANCE; CHEMICAL AMPLIFICATION; HIGH-RESOLUTION; STYRENE |
| Subjects: | Q Science |
| Divisions: | Faculties > Science Technology and Medical Studies > School of Physical Sciences |
| Depositing User: | Maggie Francis |
| Date Deposited: | 29 Oct 2008 17:27 |
| Last Modified: | 14 Nov 2012 14:41 |
| Resource URI: | http://kar.kent.ac.uk/id/eprint/9069 (The current URI for this page, for reference purposes) |
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