Skip to main content

Fabrication, RF Characteristics and Mechanical Stability of Self-Assembled 3D Microwave Inductors

Dahlmann, Gerald W., Yeatman, Eric M., Young, Paul R., Robertson, Ian D., Lucyszyn, Stepan (2002) Fabrication, RF Characteristics and Mechanical Stability of Self-Assembled 3D Microwave Inductors. Sensors and Actuators A: Physical, 97-98 . pp. 215-220. ISSN 0924-4247. (doi:10.1016/S0924-4247(01)00851-2) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:7293)

The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided.
Official URL:
http://dx.doi.org/10.1016/S0924-4247(01)00851-2

Abstract

We present a method for the fabrication of vertical inductors for radio-frequency and microwave applications. This process uses five levels of lithography and electroplating, with no substrate removal, high temperatures or serial process steps. Rotation of the inductors perpendicular to the substrate is achieved by surface tension driven self-assembly, giving separation from the substrate and therefore increasing substantially the Q and self-resonant frequencies. Meander and spiral air-bridged inductors of up to 5.5 nH are demonstrated. The Q of 2 nH inductors shows an increase from 4 to 20 after having undergone the self-assembly process. Mechanical sensitivity is evaluated through finite element modelling, and the maximum displacements indicated are below 10 nm for 1 g of loading. Mechanical resonance frequencies are found within the 6-15 kHz range. (C) 2002 Elsevier Science B.V. All rights reserved.

Item Type: Article
DOI/Identification number: 10.1016/S0924-4247(01)00851-2
Uncontrolled keywords: RF-MEMS, High-Q inductors, Self-assembly
Subjects: T Technology > TK Electrical engineering. Electronics. Nuclear engineering > TK7800 Electronics
Divisions: Divisions > Division of Computing, Engineering and Mathematical Sciences > School of Engineering and Digital Arts
Depositing User: Yiqing Liang
Date Deposited: 18 Sep 2008 10:05 UTC
Last Modified: 16 Nov 2021 09:45 UTC
Resource URI: https://kar.kent.ac.uk/id/eprint/7293 (The current URI for this page, for reference purposes)

University of Kent Author Information

  • Depositors only (login required):

Total unique views for this document in KAR since July 2020. For more details click on the image.