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A Generalized Transport-Equation For Ion-Implantation Into Infinite Targets

Bowyer, M.D.J., Ashworth, D.G., Oven, Robert (1994) A Generalized Transport-Equation For Ion-Implantation Into Infinite Targets. Journal of Physics D: Applied Physics, 27 (12). pp. 2592-2600. ISSN 0022-3727. (doi:10.1088/0022-3727/27/12/021) (The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided) (KAR id:20399)

The full text of this publication is not currently available from this repository. You may be able to access a copy if URLs are provided.
Official URL:
http://dx.doi.org/10.1088/0022-3727/27/12/021

Abstract

In this paper a transport equation (TE) is derived which incorporates arbitrary distribution functions and a cut-off energy. Integral equations for the gas-like and liquid free-flight path length distribution models are both incorporated into the transport theory computer code KUBBIC using the two-parameter differential nuclear scattering cross section. Simulations for the ion As implanted into a-Si are compared with those performed using a parallel processor Monte Carlo (MC) code based on TRIM. Excellent agreement is obtained when using four versions of the liquid model, including use of the Biersack free-flight path extension formula and the time integral hard sphere approximation. In addition, the effects of varying the maximum impact parameter are investigated as is the effect of the ordering of nuclear and electronic interactions. The TE formalism and solver presented in this paper serve as a powerful tool for testing new approximations which may be incorporated into MC codes in order to improve computational efficiency.

Item Type: Article
DOI/Identification number: 10.1088/0022-3727/27/12/021
Subjects: Q Science > QC Physics
Divisions: Divisions > Division of Computing, Engineering and Mathematical Sciences > School of Engineering and Digital Arts
Depositing User: P. Ogbuji
Date Deposited: 04 Jul 2009 07:44 UTC
Last Modified: 16 Nov 2021 09:58 UTC
Resource URI: https://kar.kent.ac.uk/id/eprint/20399 (The current URI for this page, for reference purposes)

University of Kent Author Information

Ashworth, D.G..

Creator's ORCID:
CReDIT Contributor Roles:

Oven, Robert.

Creator's ORCID: https://orcid.org/0000-0002-8517-3634
CReDIT Contributor Roles:
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