Generating ion implantation profiles in one and two dimensions .1. Density functions

Bowyer, M.D.J. and Ashworth, D.G. and Oven, R. (1996) Generating ion implantation profiles in one and two dimensions .1. Density functions. Journal of Physics D-Applied Physics, 29 (5). pp. 1274-1285. ISSN 0022-3727. (The full text of this publication is not available from this repository)

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Official URL
http://dx.doi.org/10.1088/0022-3727/29/5/022

Abstract

In this, the first of two papers, the problem of constructing ion implantation profiles in one and two dimensions from depth-independent spatial moments is discussed. Comparisons are made between Pearson and Johnson curves, constructed from moments produced by a transport equation solver, and profiles obtained directly from Monte Carte simulations. A set of such comparisons, using consistent input quantities, is performed over a range of ion-target mass ratios and energies. For projected range distributions of the ions B, P and As into a-Si, a single Johnson type (S-B) describes the implants over the energy range 1 keV to 1 MeV. The description using Pearson curves requires two types (I and VI). Also, taking the Monte Carlo data as a reference, the Johnson curves are equivalent, if not superior, to the Pearson curves in terms of fit accuracy. For lateral distributions of the same ion types over the same energy range it is shown that if the depth-dependent lateral kurtosis is less than 3.0, then the Pearson type II (bounded), Johnson type S-B (bounded) and the modified Gaussian (unbounded) curves prove acceptable representations. If the depth-dependent lateral kurtosis is greater than 3.0 then the Pearson type VII (unbounded) and Johnson type S-U (unbounded) curves are good representations.

Item Type: Article
Subjects: Q Science > QC Physics
Divisions: Faculties > Science Technology and Medical Studies > School of Engineering and Digital Arts
Depositing User: M.A. Ziai
Date Deposited: 16 May 2009 05:46
Last Modified: 16 May 2009 05:46
Resource URI: http://kar.kent.ac.uk/id/eprint/18838 (The current URI for this page, for reference purposes)
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