In situ substrate temperature measurements during radio frequency sputtering of ZnO thin film using fiber Bragg grating

Zayer, Nadhum K. and Henderson, Philip J. and Grellier, A.J.C. and Pannell, Christopher N. (1999) In situ substrate temperature measurements during radio frequency sputtering of ZnO thin film using fiber Bragg grating. Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films, 17 (3). pp. 871-876. ISSN 0734-2101. (The full text of this publication is not available from this repository)

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Official URL
http://dx.doi.org/10.1116/1.581696

Abstract

Several research groups throughout the world are currently working on fiber acousto-optic components, principally phase modulators, made by depositing a film of piezoelectric materials such as zinc oxide (ZnO) directly onto the optical fiber. It is well known that the quality of the resulting film is highly dependent on the temperature of the substrate (i.e., the fiber), but this has not been directly measured in situ. We present for the first time in situ measurements of the fiber temperature during the deposition process using a fiber Bragg grating temperature sensor. We show that the fiber temperature may rise substantially above that of its immediate surroundings. We also present a simple model for the heat flow for the fiber and the holder based on the heat gain from the plasma and the radiation loss between the various components in the sputtering chamber.

Item Type: Article
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK5101 Telecommunications > TK5103.59 Optical communications, Fibre-optics
Q Science > QC Physics
Divisions: Faculties > Science Technology and Medical Studies > School of Physical Sciences > Optics
Depositing User: F.D. Zabet
Date Deposited: 14 Mar 2009 16:53
Last Modified: 12 Jun 2014 14:18
Resource URI: http://kar.kent.ac.uk/id/eprint/16771 (The current URI for this page, for reference purposes)
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